Controller network and method of controlling a controller network

ABSTRACT

A method of controlling a controller network is provided, the controller network comprising a plurality of devices, a controller for outputting control data to the devices, and a plurality of interface modules, each interface module being arranged to connect a respective device to the controller via the network. The method comprises: outputting, from the controller, a control message addressed to a first device, the control message corresponding to an action to be performed by the first device; receiving, at a first interface module connecting the first device to the network, the control message; storing the control message in a memory of the first interface module; broadcasting, from the controller, a trigger message addressed to at least the first device; receiving, at the first interface module, the trigger message; and passing, in response to the trigger message, the control message to the first device such that the action corresponding to the control message is performed. A corresponding controller network is also provided.

The present invention relates to controller networks and method of controlling controller networks.

Many systems now make use of a network to manage a number of electrically-controlled devices from a central controller. Such devices are often called ‘OEM’ (original equipment manufacturer) devices, which require at least one or more electrical control (data) signals as well as electrical power, and may also provide electrical output (data) signals on their status. An example would be a ‘mass flow controller’ for controlling a gas flow, with electrical connections typically including: one analogue input (the ‘set point’); one analogue output (proportional to the actual gas flow); DC power supplies; and one or more digital (on or off) controls to set the device fully open or fully closed. OEM devices sometimes provide serial interfaces, signalling by strings of high and low states to an agreed protocol. Typically, such devices comprise embedded microcontrollers for local control of their functions. In the following, all such devices are referred to as ‘OEM devices’, even if these are bespoke designs, not bought from an original equipment supplier.

Examples of apparatus which may make use of such systems include industrial machines, manufacturing plants and processes, vehicles and specialised equipment such as laboratory tools and thin film deposition chambers.

Such tools typically include several different OEM units, each with its own electrical interface. This usually requires a custom electrical design to provide the required connections to each OEM device. Serial communications can reduce the number of physical wires, but power must still be supplied in addition. There is also the problem that there are many different serial signalling protocols, and it may be necessary to combine OEM devices with more than one protocol on the same system.

Systems that require the synchronous control of many OEM or bespoke devices have conventionally been achieved through connecting all OEM devices to a central hub where commands are given and data read back. Such systems have often been constructed in a manner that is rigid and inflexible to change or possible adaptation. The hard-wiring of many OEM or bespoke devices distributed over some area or across a machine to a central PLC (Programmable Logic Controller) is an example of such a system.

Where multiple devices that require connection to a PLC exist in a system that has complex wiring and/or looms that are not trivial to separate, the addition or removal of such a device is understandably difficult and in most cases a time consuming enterprise. Repositioning of such a device in the system is also difficult and suffers from similar drawbacks.

The time expended building such systems is also a nontrivial and demanding process with many opportunities for wiring errors that cannot be detected until power is applied to the system on a final check. Any wiring errors that are found are not simple to fix and may require the system to be partially disassembled and/or wiring looms to be split apart.

When complex systems are constructed with many OEM or bespoke devices the wiring time can be considerable. Each OEM or bespoke device will require the correct plug or socket to be formed with the correct cable of the correct length which can vary depending on the type of machine the device is installed on. If a system is controlled via a PLC then further wiring time is expected and further wiring errors are likely.

Some examples of controller networks are given in U.S. Pat. No. 5,225,974, US-A-20050198406, US-A-20070255879, US-A-20070223382 and US-A-20080114902.

Another problem encountered in controller networks arises due to time delays in the system. On a directly connected I/O system, the time delay between operating individual outputs can be very short—often less than 1 microsecond. However, when replacing such a system with a networked solution, these times are increased to between 200 microseconds and 1 millisecond. Due to the serial nature of most networks, a message must be transmitted and acknowledged for each output to be changed.

Whilst these times are still short, they can begin to become significant in processes requiring very short step times and in some circumstances could even change the required sequence of operation.

For example, there is a specific problem to solve in the field of thin film etching and deposition processes using vacuum plasma processing, in that the step times for individual parts of the overall recipe are becoming shorter. Cyclical gas chopping processes use short pulses of two different gases or mixtures, as described for instance in K. Tsujimoto et al., “A New Side Wall Protection Technique in Microwave Plasma Etching Using a Chopping Method”, 1986, Extended Abstracts of the 18th Conference on Solid State Devices and Materials, Tokyo, pp. 229-232. Shorter gas pulses lead to reduced scalloping of the sidewalls of etched features. Short gas pulse times are also demanded by atomic layer etching and atomic layer deposition methods. In these instances it is important to synchronise the different process devices with increasing precision, so that the intended gas flows and plasma powers coincide during a single process step. With conventional control methods, for example, the plasma power setting from any one step could inadvertently be used for a significant part of an adjacent step. An improved control system for such thin film plasma processing tools would therefore be highly desirable.

In accordance with the present invention, a method of controlling a controller network is provided, the controller network comprising a plurality of devices, a controller for outputting control data to the devices, and a plurality of interface modules, each interface module being arranged to connect a respective device to the controller via the network, the method comprising:

outputting, from the controller, a control message addressed to a first device, the control message corresponding to an action to be performed by the first device;

receiving, at a first interface module connecting the first device to the network, the control message;

storing the control message in a memory of the first interface module;

broadcasting, from the controller, a trigger message addressed to at least the first device;

receiving, at the first interface module, the trigger message; and

passing, in response to the trigger message, the control message to the first device such that the action corresponding to the control message is performed.

By storing operating instructions in the interface module and then triggering their execution in this way, the timing of device actions can be precisely controlled. The facility allows modules to receive and store instructions which are then actioned by a single ‘broadcast’ message in the manner of a ‘starting gun’. This can be used to trigger a diverse array of modules to change their output states synchronously and/or to execute a series of instructions in quick succession. It should be noted that the “actions” triggered could be any change in the device, and need not involve a physical response. For example, an action could be to output status data to the network. It should also be noted that the interface module used to store the operating instructions could be physically integrated into the device. However, it is preferred that the interface module is provided between the device and the controller.

An additional benefit of this method is a reduced peak loading on the controller and on the network when the end of a step (e.g. a series of actions) is reached and the next step is started. Rather than requiring all the new control signals and demands to be transmitted at this time, they can be transmitted at any time after the start of the previous step, requiring only the single trigger message to trigger the next step. The process can also be aborted at any point by sending a different ‘broadcast’ message.

The method is particularly useful where a device is to perform a sequence of actions. Hence, preferably, a plurality of control messages, each corresponding to an action to be performed, are output to, received and stored by the first interface module before the trigger message is broadcast, and in response to the trigger message, the plurality of control messages are passed to the device in sequence such that the corresponding actions are performed by the device in sequence. In doing so, unintentional delays between the actions in the sequence can be eliminated.

This sequence could be the same as the sequence in which the control messages are received. In other preferred examples, the control messages each include scheduling information and the control messages are passed to the device in sequence in accordance with the scheduling information. For example, the scheduling information could relate to an order that the actions should be performed in, or provide timings, relative to the receipt of the trigger message. In particularly preferred examples, the control message includes information as to whether the corresponding action is to be performed immediately upon triggering, or after a delay period. If the latter, the control message may additionally indicate the duration of the delay period. Alternatively, the duration of the delay period may be pre-programmed into the or each interface module and applied to all control messages indicating a requirement for a delay. The pre-programmed delay period may vary between interface modules and more than one delay period may also be pre-programmed into each.

In a preferred embodiment, a plurality of control messages are output by the controller, at least some of the control messages including scheduling information defining that the corresponding actions are to be performed after respective delay periods, such that the issue of a corresponding trigger message initiates the corresponding actions in a controlled, timed sequence.

The method also finds particular advantage where more than one device is to be controlled synchronously. Hence, preferably, a plurality of control messages are output by the controller addressed to a first plurality of devices, each interface module connecting one of the addressed devices to the network receiving and storing one or more of the control messages, and the trigger message broadcast by the controller is addressed to at least some of the first plurality of devices, each of the interface modules receiving the trigger message passing, in response, its stored control message(s) to the respective device such that the corresponding action(s) is/are performed synchronously by the devices to which the trigger message is addressed.

All of the interface modules which receive the trigger message do so simultaneously and can therefore execute the stored instructions precisely in coordination with one another.

Preferably, the or each trigger message includes an identifier for distinguishing one trigger message from another, and the method further comprises

prior to outputting the control message(s), outputting a storage command from the controller addressed to the first device, the storage command including trigger data identifying a trigger message;

the interface module corresponding to the first device storing subsequently received control messages and associating the stored control messages with the trigger data;

such that when a trigger message is received by the interface module, the control message(s) associated with the identifier of the trigger message are output by the interface module to the device.

In preferred examples, the storage command further comprises a control message which is stored upon receipt of the command by the module and associated with the trigger data.

Since the trigger message is still a message in its own right, several different trigger messages can be broadcast to activate different groups of devices and further trigger messages used to shut down groups of devices. These messages can be dynamically allocated, so the function is not restricted in the way it can be used.

In some preferred embodiments, once the control message has been passed to the device, the control message is deleted from the memory. In this way, the same trigger message can be “reissued” without instigating the same commands.

However in particularly preferred cases, after the control message has been passed to the device, the control message is retained in the memory and may be passed to the device again upon receipt of a second trigger message. This enables frequently used actions, or sequences of actions, to be initiated multiple times using very low network bandwidth. As an example, many processes require repeated execution of two or more steps. In this case, the interface modules can be pre-programmed for steps A, B, C etc. and the process can then be run by simply sending broadcast messages to Trigger A, Trigger B etc. Operating in this way allows for very short step times with very consistent change over conditions between steps but without creating undue network traffic.

In some preferred implementations, this is achieved by the control message including deletion information defining whether, or after how many trigger messages, the control message is to be deleted from the memory. In other preferred cases, the method may further comprise, after the control message(s) have been passed to the device, outputting a deletion command from the controller addressed to the first device, the deletion command including trigger data identifying a trigger message; the interface module corresponding to the first device deleting stored control messages associated with the trigger data upon receipt of the deletion command.

In a preferred embodiment, the trigger message is broadcast to all devices.

The present invention further provides a controller network adapted to perform the above described method, such as a controller network comprising one or more devices and a controller for control of the devices, each of the devices being connected to the controller via an interface module, wherein the controller is adapted to output a control message addressed to a first one or the devices, the control message corresponding to an action to be performed by the said first device; a first interface module connecting the first device to the network is adapted to store the control message in a memory of the first interface module upon receipt of the control message; the controller is further adapted to broadcast a trigger message addressed to at least the first device; and the first interface module is further adapted to pass, in response to receipt of the trigger message, the control message to the first device such that the action corresponding to the control message is performed by the first device.

The or each interface module preferably comprises a processor and a memory for storage of the control message(s). However, in particularly preferred embodiments, where the controller is adapted to supply and/or receive data according to a network protocol, and the device is adapted to supply and/or receive data according to a device protocol, the interface module may further comprise:

a network connector supporting a plurality of network channels for connecting the interface module to the controller via the controller network;

a device connector supporting a plurality of device channels for connecting the interface module to the device;

a conversion unit arranged to receive the plurality of network channels from the network connector, and adapted to convert data between the network protocol and the device protocol, the conversion unit having one or more signal terminals for supplying and/or receiving signals to or from the device; and

a configuration unit between the conversion unit and the device connector, adapted to configure the interface module to the device by routing selected device channels to selected signal terminals of the conversion unit;

wherein the configuration unit is separable from and removably coupled to the conversion unit such that the interface module may be configured for use with a different device by replacement of the configuration unit.

By making it possible to separate the configuration unit from the rest of the interface module, a generic conversion unit can be supplied for processing the data received over the network into a format suitable for the device (and vice versa). In other words, the same conversion unit can support several different device protocols simultaneously. For example, the conversion unit could be adapted to convert serial network data into a number of analogue and/or digital inputs for transmission to the device, which may be suitable for use by a number of different end devices. The design of the conversion unit need not take into account which of those inputs are in fact to be used by the device, nor how to connect them to the correct device channels. This is achieved by the removable configuration unit, which connects the appropriate inputs to the desired device channels. Hence it is only the configuration unit which is device-specific and since this typically comprises only routing means (e.g. an appropriate arrangement of tracks), this is an inexpensive component.

As a result, the overall part count is kept small whilst not requiring the use of complex and expensive re-programmable interfaces.

The configuration unit could be integral with the device connector such that both are replaced when configuring the module for a different device, but preferably the configuration unit is also removably coupled to the device connector to minimise work involved in reconfiguring the module and to keep the cost of the replaceable component low.

Preferably, the interface module is further adapted to detect faults in the connection between the interface module and the device. This additional functionality assists the user in fast diagnosis of any network connection problems. Advantageously, the interface module incorporates a fault detection circuit for the detection of open circuits and short circuits, and/or a load impedance circuit for determining the approximate impedance of a load.

In a particularly preferred embodiment, the module further comprises an indication means for indicating status information to a user, preferably a light source or an optical display, the conversion unit being further adapted for control of the indication means. This enables the user to locate faults in the network quickly. Preferably the module is adapted to actuate the indication means to indicate the detection of faults in the connection between the interface module and the device.

In preferred examples, the network protocol is a serial data protocol and hence, preferably, the conversion unit further comprises a serial data interface for communicating with the controller via the control network.

The interface module could be permanently programmed with a network address but preferably, the module further comprises an address switch section for programming the interface module with a network address, the address switch section preferably being comprised in the conversion unit. In other examples, the network address could be provided on the configuration unit such that it is automatically set when the module is configured to the specific device.

In particularly preferred embodiments, power is supplied to the devices through the same controller network. Hence, preferably, the plurality of network channels includes at least one power channel for supplying power to the device from at least one power source; one or more of the signal terminals of the conversion unit are adapted to supply power to the device; and the plurality of device channels includes at least one power channel for supplying power to the device. Such an arrangement allows for a single connection to be made to each device, thereby reducing the wiring requirements still further.

It should be noted that power and data can be supplied over one and the same channel. For example, a digital input channel typically also supplies the device with the power it requires. Hence any one signal terminal could act as both a “data” terminal and a “power terminal simultaneously.

In some systems, all devices may be suited to the same power supply requirements. However, in many cases, the various devices may require different power inputs. Hence, preferably, a plurality of power sources are provided and the plurality of network channels includes more than one power channel, each power channel having different power supply characteristics, and the conversion unit includes a corresponding plurality of signal terminals for supplying power to the device. The appropriate power supply for each device is selected by the configuration unit, by routing the power lines of the device to the power terminals on the conversion unit supplying the desired power levels.

Preferably, each power channel supplies power at a different voltage. Advantageously, the at least one power channel is a DC supply, although AC supplies may be appropriate in other cases. In particularly preferred examples, the power channel(s) include one or more of: a +24V / ground DC supply; a +15V/ground/−15V DC supply and a +5V/ground DC supply. For example, the power lines may be: +24V; ground; +15V; −15V; +5V and ground, any combination of these lines being selected by the configuration unit to provide the appropriate power supply.

Advantageously, the interface module further comprises a power supply interface section adapted to decouple the one or more power channels and regulate power supply to the conversion unit.

In a particularly preferred embodiment, the device connector comprises a plug or a socket for direct connection to the device, preferably a 15-pin or 25-pin plug or socket. In other words, the interface module connects directly to the device with no other components between the device connector and the device. In particular it is preferable that the plug or socket is directly connected to the interface module without the use of a cable. This does away with the need for specialised cabling, the interface module effectively forming an extension of the device itself.

Preferably, the conversion and configuration units are housed within a body of the device connector. For example, the units could be fitted within a standard plug or socket housing so as to take up no additional space. Advantageously, the module further comprises fixing means for locking the interface module rigidly to the device. For instance, thumb screws enable the module to be easily yet securely affixed to the device.

Preferably, the controller network comprises a CANbus bridge between the interface module(s) and the controller. Advantageously, the controller is adapted to supply and/or receive data in serial format.

In preferred embodiments, the controller network further comprises at least one power source, power being supplied to the one or more devices from the at least one power source through the network. Advantageously, data communication and power are provided to each device through a common connector.

Preferably, the controller is a programmable logic controller, or a computer. Advantageously, the controller is adapted for synchronous control of the devices.

The devices could each be individually connected to the network via their respective interface modules. However, preferably, the network further comprises at least one distribution node, each distribution node being adapted to connect a plurality of interface modules to the control network.

Also provided by the present invention is a tool, preferably a thin film processing tool, still preferably a thin film plasma processing tool, comprising a controller network as described above. In this case, the device(s) in the network may include heaters, turbo-pump controllers, valve controllers, etc.

Examples of controller networks and methods in accordance with the present invention will now be described with reference to the accompanying drawings, in which:

FIG. 1 shows an embodiment of a controller network;

FIG. 2 schematically shows an embodiment of an interface module in terms of its functions;

FIG. 3 depicts an embodiment of an interface module showing its main components;

FIG. 4 shows a partial cross-section through selected components of the interface module of FIG. 3;

FIG. 5 shows a node module for use in the controller network, and two interface modules;

FIG. 6 shows a further embodiment of a controller network;

FIG. 7 depicts examples of communications which may be supported by a controller network; and

FIG. 8 shows a further example of a controller network.

Described hereinafter are embodiments of controller networks for controlling devices such as embedded microcontroller devices. The network may be referred to as a ‘Ubiquitous bus’ (U-bus) network. The network can support a standard network protocol, for example a multi-drop serial communications link such as RS485, as well as control inputs and outputs suitable for the application. For instance, a tool such as a chemical vapour deposition (CVD) chamber may have devices including:

-   -   A turbo-pump controller, requiring a RS232 serial communications         interface and a device-specific protocol;     -   A mass flow controller, requiring analogue demand and read back         in addition to digital on/off controls and +/−15V power         supplies;     -   A pressure gauge, requiring a RS232 interface to a device         specific protocol and a +24V power supply; and     -   A valve controller, requiring digital outputs and digital         readbacks, operating at +24V.         Other examples of applications for the system are reactive ion         etching apparatus, plasma etching apparatus, plasma enhanced CVD         apparatus, hydride vapour phase epitaxy apparatus, sputter         deposition chambers, ion beam deposition chambers and ion beam         etching apparatus.

The disclosed configurations allow greater flexibility in connecting such multiple OEM or bespoke devices to a network and providing each with the necessary communications. In addition, power may optionally also be delivered over the U-bus network, across the same cable as the data, such that no separate connection for power is required to the devices, thereby minimising the installation time and part count.

FIG. 1 shows an embodiment of a synchronous controller network 1. In this example, the network is controlled by a controller 2 in the form of a programmable logic controller (PLC) or a computer, which is adapted to provide synchronous control to a number of devices 5. The controller 2 is connected via a CANbus bridge 3 to a number of optional nodes 4, which will be described in more detail below. Each OEM device 5 a, 5 b, 5 c is connected directly to an interface module 10, which may be termed a “Ubiquitous module” (U-module). In FIG. 1, only three devices 5 a, 5 b, 5 c are shown for clarity, connected to the network via corresponding U-modules 10 a, 10 b, 10 c. However, in practice each U-module 10 will be connected to a respective device 5. Each U-module 10 is connected via a U-bus cable 6 to a distribution node 4, each node 4 being capable, in this example, of taking eight U-module connections.

In this embodiment, the U-bus 6 consists of eight network channels (i.e. eight lines or wires), providing a common cable for both data and power. The channels include:

1. Serial data (RS485)

2. Serial data (RS485)

3. +24Vdc power

4. Ground

5. +15Vdc power

6. −15Vdc power

7. +5Vdc power

8. Ground

Power for lines 3 to 8 is supplied by one or more power supplies 7 provided to the network. This set of power supplies covers the different supply requirements of most OEM devices 5. However, alternative power channels at different voltages or NC supplies may be appropriate in some cases.

It should be noted that whilst, in this case, the network operates according to a serial data protocol, the present invention could equally be implemented in a parallel data network, as will be appreciated by the skilled man.

Between the distribution nodes 4 and the controller 2 a conventional CANbus bridge structure 3 is implemented. In the example of the structure layout shown in FIG. 1, a PLC 2 is connected to the distribution nodes 4 via CANbus bridge 3 which then feed the interface modules 10 via the U-bus 6. The CANbus (operating between the controller 2 and the CANbus bridge 3) supports the internationally recognised standard CAN protocol (ISO11898), with the bridge 3 providing an interface between the CANbus protocol and the U-bus protocol (described below). The PLC 2 in FIG. 1 is used only as an example and should in no way limit the scope of the invention. For instance, a computer could be used as the controller instead.

In the network 1, the three exemplary devices 5 a, 5 b, and 5 c have different input/output data requirements. For instance, device 5 a may require analogue inputs and generate analogue outputs, device 5 b may require digital inputs and generate digital outputs, and device 5 c may require serial data inputs and outputs, which may or may not operate on the same protocol as the Ubus 6. The devices may also require different power supplies.

Each of the U-modules 10 a, 10 b and 10 c is arranged to convert data from the U-bus protocol into the format(s) required by its corresponding device 5 a, 5 b, or 5 c. As described in more detail below, this is achieved by equipping each interface module with a conversion unit, for performing the necessary data processing, and a configuration unit which configures the module to the specific device 5 a, 5 b, 5 c. The conversion unit is generic, in that it is typically compatible with more than one of the devices in the network: for example, a module 10 having a conversion unit adapted to provide analogue inputs/outputs will be suitable for use with device 5 a as well as other devices 5 a′, 5 a″ (not shown), which also require analogue inputs/outputs though may have a different configuration of device channels (and potentially different power supply requirements). In some implementations, the conversion units of all the interface modules 10 could be of the same design, and provide the same set of analogue, digital and serial inputs/outputs as well as multiple power channels.

However in practice it is preferred to provide a small number of different conversion units: one for devices requiring mainly analogue inputs/outputs, one for devices requiring mainly digital inputs/outputs, and one for devices requiring mainly series data inputs/outputs. A further version of the conversion unit may be supplied for devices incorporating sensors, such as temperature sensors. Hence the interface modules 10 shown in FIG. 1 in fact comprise a mixture of different module types, as necessitated by the requirements of the devices 5. The network can therefore be set up to control various mixed analogue, digital and serial devices. Where a device is directly addressable by either the CANbus 3 or the U-Bus 6 protocols, a conversion U-module is not required.

FIG. 2 shows the functionality of a general interface module 10. As indicated above, the module comprises a conversion unit 12 and a configuration unit 13. The conversion unit 12 receives the network channels 11, for example the eight lines of the configuration described above. Device channels 14 connect the interface module to the device 5. Each device channel enables the transmission of data or power to (or from) the device. Typically, 15 or 25 device channels may be supported.

The conversion unit 12 processes the signals from network channels 11 into formats suitable for the device 5 and the resulting processed signals are output at signal terminals represented by block 22. These signal terminals may include one or more data outputs (for transmission to the device 5) in analogue, digital and/or serial formats, as well as multiple power channels and inputs configured to receive data from the device 5 in analogue, digital and/or serial formats. Signal terminals are provided for connection to all power supply rails, every available input or output point and, in some cases, a selection of other circuit connections. For example, the conversion unit could provide any of:

-   -   Biasing or loading terminals to ensure that specific levels are         maintained if the device 5 (and interface module 10) is         disconnected from the network;     -   Connections for arranging digital outputs to be sourcing         (driving high) or sinking (driving low) and/or selecting the         operating voltage of the digital outputs (which are provided         across a wide voltage range in any case);     -   Connections for selecting a particular gain for an analogue         input or output channel; and     -   Additional channels to allow for programming and testing of         modules.         The conversion unit is therefore generic in that the signal         terminals provide data connections and power supplies which can         be used by more than one specific device 5.

Configuration unit 13 is disposed between the device channels 14 and the signal terminals 22 and is the only component which is specific to the particular device 5. The unit 13 is physically detachable from the conversion unit, and preferably from the rest of the interface module 10, so that it can be replaced in order to configure the module 10 to the specific device 5. The configuration unit 13 includes routing means 25 for connecting selected device channels 14 to selected signal terminals 22. Typically, not all of the signal terminals 22 will be selected for connection to the device. Similarly, in many cases not all of the device channels 14 will be required to be connected. The configuration unit is designed so as to provide the device channels with the appropriate inputs and outputs of those presented by the conversion unit, as well as the desired power channel(s). Preferably, the configuration unit consists solely of routing means, so that it is an inexpensive, easily replaceable component.

The conversion between the data protocol supported on the U-bus 6 and the format(s) required by the device 5 is performed by a microcontroller 20, programmed accordingly. The microcontroller can be chosen from a broad range of possibilities to allow the optimum selection of integrated I/O, size and price. Choosing the appropriate integrated I/O enables the module 10 to be kept small enough to attach directly to the target OEM device 5. For example, an “ARM 7” core within devices from Analog Devices, Inc. has been found suitable for analogue capability, and devices from NXP Semiconductors for best digital capability. However devices based on alternative architectures would be equally suitable.

Where the network protocol is a serial data protocol (as in the present example), an appropriate serial data interface 23 may also be provided. This may preferably include electromagnetic interference (EMI) protection.

The conversion unit 12 may further include input and output drivers, represented by section 21. The output drivers convert the output of the microcontroller 20 levels to the ‘industrial’ levels required by device 5, which will be supplied at the signal terminals 22. Digital modules may also incorporate, in the output drivers, fault detection circuits allowing open circuits and short circuits to be identified. For example, the current of an output can be monitored in the ON and OFF states, and compared with known or expected values. Allowing a very small current to flow in the OFF state will allow detection of an open circuit. Control circuits which implement this function are well known to the skilled man. Analogue modules may likewise incorporate a circuit allowing an approximation of the load impedance of the device 5 to be determined. Input circuits provide scaling of the expected voltage to be within the range of the microcontroller 20 inputs and in addition provide a level of protection to the microcontroller 20. All I/O lines may be provided with EMI protection.

The interface module 10 may also be provided with an address switch 24, which preferably forms part of the conversion unit. This can be accessed by a user to set the network address of the device 5. In other examples, the address could be pre-programmed. The interface module 10 will thus be associated with a single network address corresponding to the particular device 5 to which the module is attached.

Where power is also supplied across the network, the conversion unit 12 is also provided with a power supply unit (PSU) interface 30. The PSU interface 30 may incorporate functions including: EMI protection and decoupling for each input supply; local regulation of microcontroller supply rails; and potential dividers to allow monitoring of supplies using analogue inputs implemented in the microcontroller 20.

FIGS. 3 and 4 show an exemplary U-module schematically in terms of its main physical components. It should be noted in particular that the number of device channels 14 and signal terminals 22 shown is purely exemplary and any number of each could be provided.

The conversion unit 12 and configuration unit 13 are disposed within a housing 17 a. The conversion unit 12 is connected to the U-bus network by a connector 16, which here takes the form of a cable (e.g. an eight line cable), permanently affixed to the housing 17 a. The network channels are therefore delivered directly to the conversion unit 12. The cable 16 is preferably of a fixed length on all modules 10 and is provided with a plug 16 a such as a RJ45 plug for quick installation onto the network.

The conversion unit 12 is configured on a PCB 15. In this case, the PCB 15 also supports connections with the device channels 14 which are delivered to the module by a device connector 17, which matches a corresponding connector on the device 5 (not shown). The device connector 17 is typically a plug or a socket, such as a D-sub connector, having a number of pins corresponding to the device channels. The PCB 15 does not connect the device channels to the signal terminals 22 and so the device channel connections could be provided separately (e.g. on a separate PCB). However, the present embodiment provides a convenient arrangement.

Between the device channels 14 and the signal terminals 22, the removable configuration unit 13 is provided. The configuration unit 13 provides routing, represented at 25, for connecting selected device channels 14 to selected signal terminals 22. Conveniently this may be achieved using a second PCB provided with appropriate tracks, known as a header board. First and second connectors 26, 27 may be provided for connecting the configuration unit to the main PCB 15, the first connector being matched to the signal terminals 22 and the second to the device channels 14. In alternative embodiments, a single connector unit could be provided, combining the functions of connectors 26 and 27. For instance, in a preferred example, a 80-way connector unit may be used, selected pins being used to connect to the signal terminals, and other selected pins being used for connection to the device channels. The two groups of selected pins provide the functions of the first and second connectors 26, 27 shown in FIGS. 3 and 4. The connector(s) enable the configuration unit 13 to be straight-forwardly detached from the conversion unit 12 and the device channels 14, and replaced with an alterative unit, with a different arrangement of routing tracks, as necessary. In other examples, the configuration unit 13 could be formed integrally with the device connector 17, and a single connector provided for joining the configuration unit to the signal terminals 22, in which case both the connector 17 and configuration unit 13 would be replaced when re-configuring the module to a new device.

In the present example, only four of the signal terminals 22 are selected for connection to four corresponding device channels 14, as represented by routing 25 on configuration unit 13. These may consist, for example, of one analogue input, one analogue output and +V/−V power lines. The same module 10 can be reconfigured for use with a different device 5 by replacing the configuration unit with another board having different routing. For example, two additional routing lines could be provided to supply the device additionally with a digital input and digital output.

In the majority of cases, the required mapping between device channels 14 and signal terminals 22 can be achieved on the configuration unit 13 by simple track connections without additional components. However in some cases additional components may be included on the header board to implement additional facilities, for example additional scaling for a low level signal or to implement an interface mode not available directly from the conversion unit 12—e.g. current loop input and output for devices which use a varying current rather than a varying voltage to signal demand and read back, which can have advantages in reduced susceptibility to electrical noise.

The module 10 plugs directly into the OEM or bespoke device via the connector 17 without the need for any cable, thereby minimising the cabling required. The present inventors have found that advances in electronic miniaturisation, and the use of surface-mounted printed circuit boards (PCBs) have made it possible to fit the electronics of the U-module 10 inside a connector housing, fitting directly to the OEM device. Hence, preferably, the housing 17 a is the standard housing of the connector 17 (i.e. the housing in which the plug/socket is mounted). These are typically robust aluminium casings and so protect the U-module whilst remaining compact. The module has easy access thumb screw fasteners 18 to affix the module 10 securely to the device 5.

Hence the described interface module or “U-module” 10 provides a simple housing design for connection directly to the OEM or bespoke device, which is easy to install or remove. The conversion receives the electrical power supplies and the U-bus serial commands via network channels 11, and converts them to the analogue, digital and serial connections for an OEM device. The present inventors have found it possible to cover the needs of the majority of OEM devices with four styles of conversion unit. For example, the “Ubiquitous digital interface” (UDI) conversion unit has 8 digital inputs and 8 digital outputs. Other versions are detailed below. By configuring the U-module interface to the OEM device using a configuration unit in the form of a header board, which can be quickly removed and installed, the number of different parts required for an installation is minimised.

Analogue Control

A first version of the interface module 10 is termed the “Ubiquitous General Interface” (UGI). The UGI is primarily used for connection from the U-bus network 6 to devices 5 that require mainly analogue communications, but may also require digital inputs or outputs. For example, devices such as mass flow controllers, gauges, power supplies, RF power sources and pressure controllers typically require analogue inputs. The conversion unit of the UGI module is arranged to provide up to four analogue input terminals (to the device) and 3 analogue output terminals (from the device) plus up to 8 digital input and output terminals.

The flexibility of the conversion unit therefore allows several channels of digital communication to exist alongside the analogue channels in the UGI module. This gives the UGI module great flexibility in communicating with many different types of OEM or bespoke devices.

The selection as to which or the inputs/outputs are used is made by adding the appropriate configuration unit 13 to the module which configures the pins required for correct connectivity to the device. The communications channels can therefore operate to read or write data in analogue or digital form. The configuration unit is small and inexpensive and the only non-generic part that is required to turn the generic UGI module into a controller for a particular device 5.

Digital Control

Where the device 5 requires only digital input and/or outputs then the “Ubiquitous Digital Interface” (UDI) module 10 can be used. The UDI conversion unit can support up to 8 digital inputs and outputs. The UDI also has the functionality of detecting open or short circuited connections for greater diagnostics and fault finding. Also up to 8 frequency counters can be implemented in place of digital input channels if required.

The UDI module 10 may be used with devices such as valves and electrical switches, for example. Frequency counters, if provided, may be used with devices where rotation speeds or pulses must be monitored, such as water flow monitors.

In general, power is supplied directly by the switched output, rather than using a separate power channel (i.e. the data channel also supplies power). In most cases, device requirements are for 24V input and output, but the conversion unit allows for anything from 5V to 24V.

Serial Control

Serial control of a device 5 is managed through the “Ubiquitous Serial Interface” (USI) module 10. The USI conversion unit is pre-programmed with the relevant serial data language and code in order to operate the serial device 5. The USI has been developed to support RS232, RS422 and RS485 serial protocols although other formats can be handled in a similar manner. The USI also supports Modbus and can also be easily adapted to use other communication protocols such as Prof ibus and OEM specific protocols.

Thus the hardware constituting each USI may be identical, with different firmware being installed as necessary during manufacture of the modules 10 to account for the different serial protocols and different manufacturer languages that the various devices require. Nonetheless the selection of the appropriate channels and routing to correct device pins is still performed by the device-specific configuration unit.

Typically, USI modules would be used for more complex devices requiring a variety of input and output functions, such as Turbo-pump controllers. However, the USI could also be used for other devices including temperature controllers, gauges and power supplies, in place of the analogue equivalents.

Sensor Control

For devices including sensors, such as temperature sensors, the conversion unit may include further processing capabilities. For example, a sensing circuit may be provided which is adapted to generate a signal corresponding to a parameter measured by the sensor. For instance, the “Ubiquitous Temperature Interface” (UTI) module conversion unit is able to read temperature sensors directly and provide control signals for analogue, phase angle, PWM and solid state power controllers. The generated signal may be passed back to the network 6 or could be returned to the device 5 as an input to a local controller.

For example, a device such as a heater may include a temperature sensor. The UTI may be configured to receive the measured temperature, compare it to a predetermined value and, depending on the device requirements, output an analogue or digital signal to the heater for use in controlling its power output.

A status indicator 19 may also be provided on every U-module 10. The status indicator is used to alert the user to open or short circuited paths at the module output port as well as for displaying bus status and indicating power supply problems. The status indicator 19 preferably comprises a multi-colour LED although any other light source or optical display, such as a LCD, could be used instead.

The status indicator 19 is controlled by the microcontroller 20 in response to information from the fault detecting circuits and/or load impedance circuits included in the input/output section 21 (described above), as well as from the

PSU interface 30.

In a preferred implementation, the status indicator will display a green colour when there are no problems detected. If any power supply is out of tolerance or an open or shorted path is detected then the status indicator flashes amber. In the event of a communication failure, the status indicator flashes red. This simple diagnostic tool is effective for determining wiring faults without having to manually measure circuit nodes. Hence this adds to the overall transparency of the system when concerned with troubleshooting or fault-finding.

As described below, the U-bus protocol defines a status byte which can be read by the module 10 in the same way as the analogue and digital inputs. This enables additional information regarding the fault to be read over the U-bus on demand. The information available will guide the engineer to the fault via two levels of information. At the first level, a status byte generated by the microcontroller 20 will resolve the problem into one of a number of categories. For example, the categories may be: +15V supply OK; −15V supply OK; +24V supply OK; digital outputs all OK; analogue outputs all OK; analogue outputs within tolerance; and no recent reset (used to detect modules that have recently been added to the network and as an additional fault diagnostic). The +5V supply is generally not included in this set since, if it is out of tolerance, the module 10 will not operate. The actual voltage level of the +5V supply can however be monitored as described below. For each of these categories, further diagnostic readings (as traditionally measured with a digital voltmeter) are available. For example, the conversion unit 12 can be set to send the measured voltages to the network in place of its normal read backs by sending a specific command code to the module 10. Another code can be used to interrogate the module type and firmware revision code. Open circuit and short circuit diagnostics are preferably always available from a UDI as an additional status word, as is the output impedance of an analogue output. Hence, the supply voltage seen by the module 10 can be measured for each of the relevant supplies, short or open circuit conditions can be resolved to a single output pin and the load impedance of analogue outputs can be measured. In this way, the fault can be isolated to a single supply or output without removing connections or covers.

The full set of signals which may be provided in this example via the indicator 19 is shown below.

LED Colour Description Red Quick isophase red flashing indicates that the module 10 is not communicating with the network. All outputs will be OFF (0 V) in this state Amber Slow occulting amber light indicates that the module is communicating with the network, but that some parameter is outside normal tolerances. In general this is due to power supply out of tolerance or there is an output which is shorted or open circuit. The status byte can be read over the network to determine the exact nature of the problem. Operation of the module may not be affected. Red-Green-Red- Calibration error - the module has failed to complete a Green self calibration routine after programming. Module requires re-calibration or repair. Red-Red-Green Two or more modules on the bus have the same address selected. Green All connections OK and network communicating

All of the different types of module 10 can be connected to the CANbus bridge 3 via distribution nodes 4. In an alternative embodiment, the function of the CANbus bridge 3 could be combined into the or each distribution node 4.

The distribution node 4, shown in more detail in FIG. 5, is designed for simple low-cost installation and simple configuration. A single distribution node will have, for example, eight RJ45 style network ports. The 8-way node is housed in a durable aluminium housing and may also contain auxiliary power ports for maximum installation flexibility. For example, in some cases, the total supply loading of all devices 5 connected via interface modules 10 to the distribution node 4 may exceed the capability of the distribution node supply cable. In this case it is possible to inject additional power via these auxiliary ports to make up the deficit. In other cases, additional power could be available from these ports to support devices that need no control, such as permanently-operating fans or illumination, etc.

To add a device 5 to the control network 1, the interface module 10 is connected to the OEM or bespoke device 5 and the RJ45 connector 16 a is connected to the 8-Way Distribution Node 4, see FIG. 5. This is advantageous since no tools are required and no hand made connections are needed. If the distribution node is fully populated then another distribution node can be easily added to the network. Similarly, if the device requiring connection is remote with respect to all present distribution nodes then another 8-way node can be added to the system.

The module may plug into any of the 8 ports on the distribution node. However, the module 10 must have the correct node address set which can made by a small 16-way switch 24 inside the module housing. The switch is accessed by a module access cover.

The distribution nodes 4 route the U-bus network to each port. The nodes may also provide over-current protection for the modules 10 and could incorporate circuits to minimise the impact of reflections on the bus data lines. The modules 10 can preferably be plugged into or removed from the nodes 4 without switching the system off—i.e. they are “hot pluggable”—the hardware and software being designed accordingly, as will be appreciate by the skilled man.

A further example of how the interface modules 10 and distribution nodes 4 can be used to quickly build a controller network 1 is shown in FIG. 6. The U-modules 10 are fastened to the OEM or bespoke devices 5 via the thumb screws 18 and then connected to the 8-way node 4 by plugging the RJ45 connector into an available port. A configuration unit 13 suited to the respective device 5 will be required for each of the interface modules 10, which will determine the pin configuration for the specific device.

All of the interface modules 10 come with a fixed length of network cable 16 permanently connected to the module case 17 a. In such instances where an extension of this cable is required a standard socket-socket adapter can be used with a suitable length of standard network cable.

Power to the devices 5 may also be supplied via the 8-way distribution nodes 4. This saves routing cables through the system to a separate power supply making the system adaptable to designer requirements.

Connection from the 8-way node 4 to the CANbus bridge 3 can be made using standard pin-to-pin cabling for low cost installation. This simplifies the procurement process and spares or upgrades can be stocked or bought in quickly.

In this example, the limit of the physical distance between the modules and the distribution nodes is 10 m. This limit is imposed by circuitry provided in the distribution node which minimises the effect of reflections on the rest of the network. As with any wired network, using a longer cable than the maximum specified could result in less reliable operation. The 8-way distribution node 4 can be separated from the CANbus bridge 3 by up to 100 m of cable if required. The CANbus itself preferably forms a linear daisy chain circuit not exceeding 50 m: the CANbus specification lays down limits on the timing of signals to ensure detection of errors on the network. The cable length, cable type and transmission speed all contribute to defining a maximum cable length. Using FIG. 6 as an example, the maximum distance between the two interface modules 10 a and 10 d could be 220 m if required and a suitable CAN interface, such as a PLC 2, could be situated 50 m from the CANbus bridge 3. There is no limit to how close together the modules may be located other than the physical size and placement of the OEM devices and interconnectors.

The described system achieves a large number of advantages, including:

-   -   Minimising the number of hand wired connections required;     -   No wire stripping involved;     -   Wire labelling is replaced with numbered modules;     -   No custom cables required;     -   Minimises field service parts required;     -   Reduces special tools required;     -   System wiring time is greatly reduced;     -   Possibility of wiring faults is dramatically reduced;     -   Only a small number of different modules types for all         combinations of serial, digital and analogue         communications—greatly reduces different part numbers;     -   Sensor control signals can be processed local by the module;     -   No separate power connection is required to the devices;     -   Since the U-module plugs directly into the device, the number of         separate cables required is minimised; and     -   The modules are ‘hot pluggable’, permitting repairs and upgrades         to be performed without the requirement to shut down the         machine.

U-Bus Protocol

The protocol on which the U-bus 6 is preferably operated will now be described. It will be appreciated by the skilled man that any suitable protocol could readily be applied.

In the present example, the U-bus 6 is a serial communications interface using a single pair RS485 network running at 115200 baud. The network is a half duplex network, allowing data transmission between the devices and the CAN bridge in both directions though not simultaneously. For the detection of transmission errors, an even parity bit is preferably provided. The bus can employ RJ45 connectors and four pairs of screened cables. This configuration allows distribution of power supplied via a single cable/connector.

As mentioned above, each device has a network address. In the present example, a single U-Bus is limited to 15 devices although this can be expanded by suitable modification of the protocol. The module address (between 1 and 15) is set within the module using a hexadecimal switch. This format allows the modules to be tested with a standard serial interface if required. HyperTerminal™ by Hilgraeve Inc., with an RS485 converter will be sufficient as a minimum requirement. The last remaining address (e.g. 0) is reserved for broadcast.

Messages on the network are provided in the general format:

-   -   #AFhhhh\r         where:

# is the “attention” character used to signify the start of a new message;

A is the module address in the form of a single hexadecimal character;

F is a function register in the form of a single hexadecimal character;

hhhh is a sequence of four hexadecimal characters defining the value of the selected function register; and

\s the “enter” character, terminating the message.

Thus each message commences with a preamble consisting of the address A of the module for which the command is intended, followed by a digit F defining the function of the message within the module. The most significant bit of the hexadecimal digit F defines “read” (0) or “write” (1). The three remaining bits define one of up to eight 16 bit registers within the module. Thus, all values of F in the range 0 to 7 (i.e. 0001, 0010, “0xxx”) define read functions, and all values of F in the range 8 to F (i.e. 1000, 1001, “1xxx”) define write functions.

For example, the read registers may include functions such as “read status”, “read analogue channel x”, and “read output status”. Thus, in response to a message such as #A3 (the reminder of the message format being omitted since this is a read function and hence no data need be supplied to the module), the output of channel 3 (for example) may be read back from the module to the network.

Likewise, write registers may include functions such as “write to analogue channel x” and “write to digital outputs”. In most cases, the data sequence hhhh defines the value of the selected function, i.e. the data to be written to the selected register, and ultimately controls the outputs provided on the signal terminals. For example, the message #A9hhhh\r may control the module to output the value hhhh on analogue channel 1. In such cases, the whole of sequence hhhh may be referred to as the “demand”—i.e. the particular value or code that is required to be output on a selected channel.

Register 8 (the first write register) is used in this example to provide additional functionality. One half of the 16 bit register is used for control of the module's digital outputs, of which there is a maximum of eight. The other half of the 16 bit register is used for control of the interface module itself. Thus, in a message #A8h′h′hh\r, the first two digits h′h′ represents a command to the interface module, and only the second two digits hh form the digital demand. Of course, any other register could be selected for this purpose.

The command field h′h′ in register 8 can be used in a number of ways, including requesting the module to read voltage levels and carry out diagnostics. Particular uses of the command field h′h′ are described in more detail below.

Write commands are acknowledged by the module with a “!” (acknowledged) or “?” (error). An invalid read request will also return a “?”.

Errors in transmission are identified by parity checks along with checking the format of the received message. In the case of an error in the reply string, the controller will ignore the data and resend the command. If an error message (“?”) is received by the controller, the command will also be resent.

All commands and responses allow for 16 bit resolution if required, enabling a range of 0 to 65535 (or -32767 to +32767 if the number is signed) for analogue outputs and inputs, or states for 16 digital outputs or inputs.

In the standard or default mode of operation, all demands hhhh (or hh in register 8) received by a module are output to the corresponding device immediately.

However, one problem which may be encountered results from delays in the network which may lead to control messages arriving at the addressed module 10 later than intended. This can lead to asynchronous behaviour with devices performing actions out of step with one another, and in the worst cases, in the wrong order.

Hence in a preferred embodiment, the interface modules 10 are further provided with a memory and are adapted for the storage of incoming control messages from the controller 2. The microcontroller 20 may be used to provide the memory.

The controller 2 is arranged to output control messages to one or more of the devices 5 according to the U-bus protocol described above, but instead of generating and outputting each message at the time at which the corresponding action is to be performed, the messages can be output at any time before the action is to be performed by the device. The interface module located between the network and the device to which the control message is addressed stores the message in its memory without passing it on for direct execution by the device. Any number of control messages may be stored by one or more of the modules 10 in this way. At a later time, the stored messages are actioned by the issuing of a trigger message.

Once a stored control message is “actioned”, it may either be performed (i.e. passed to the device) immediately or after a predetermined delay has elapsed. Preferably, each control message itself defines whether the associated demand should be output immediately or after a delay, and if so, the duration of the delay. This can be used to take into account known differences in the response times of the various devices in the network, or to arrange a sequence of actions to take place on issue of a single trigger message. Thus a single trigger message may initiate multiple actions either simultaneously or with a defined set of delays. Alternatively or additionally, each interface module could be pre-programmed with a delay period to be applied to all stored messages (or all stored messages which indicate the need for a delay), and the delay period may vary between the interface modules, according to the nature of the associated devices.

Storage of control messages is achieved using the command field h′h′ in the eighth register. When a module is required to switch from the default mode into the storage mode, the controller sends a message in the format #A8h′h′hh\r, where h′h′ represents a number within a predefined storage range. In the present example this can be anything between 1 and 127 (inclusive). The module corresponding to address A receives the message and interprets the command h′h′ as an instruction to store any demand also included in the message (i.e. the digital output values hh), and all subsequently received demands. The value of h′h′ constitutes trigger information data. For example, if h′h′ has the value “1”, then the stored demands will not be output until a corresponding trigger, identified as trigger “1”, is issued.

The module will continue storing all received messages so long as register 8 contains a storage command. Thus, operation of the module can be switched back to the default mode (i.e. performing incoming demands immediately) by supplying a command h′h′ which is outside the predetermined storage range. For example, the value “0” may be used. The trigger information data can be adjusted for different incoming demands to be stored by changing the value h′h′ to another value within the predetermined range.

When it is desired to perform stored action(s), the controller 2 generates a trigger message and broadcasts it to one or more, preferably all, of the devices 5. For example, the trigger message would typically be addressed with the address digit “0”, which will be recognised by all of the devices in the network. The trigger message is otherwise of the same format as the storage command.

For example, the trigger message could be #08h′h′hh\r, where h′h′ again takes a value between 1 and 127. The value acts as an identifier distinguishing one trigger message from another. The trigger message is distinguishable from the storage command by the use of the broadcast address “0”.

On receipt of the trigger message, the modules 10 respond by passing one or more of the stored control messages to their respective device, such that the corresponding actions are executed. In this way, a series of actions can be performed by one or more devices in quick succession, with no possibility of delays caused by the network.

The demands to be actioned by a trigger message are determined by the stored trigger data. When a trigger message is issued, all of the stored demands which designate that same trigger message will be output. For example, in the above case, the storage message identifies trigger “1”, and all subsequent control messages received by the module are saved designating trigger “1”. When a trigger identifying itself as trigger “1” is received, all of the demands corresponding to these saved control messages are output. Several commands may include the same trigger identifier, so that all such commands are actioned by one trigger message. Each module may store a plurality of commands corresponding to various different triggers.

FIG. 7 shows schematically examples of messages which may be issued by the controller (centre column) and the responses of two interface modules “a” and “b”. Each message is designated M1 to M9 for ease of reference. It should be noted that, for clarity, this diagram does not show any acknowledgement or error messages sent between the modules and the controller.

The first message M1 is an instruction to module “a” to output the value hhhh on register 9, e.g. the first analogue output. This is performed immediately by the module “a” upon receipt. A second message M2 contains a storage command. This is recognised by the designation of register 8, which indicates that the first two hexadecimal digits, h′h′, contains a command. The value of h′h′, x, is between 1 and 127 such that the module “a” recognises this as an instruction to store both the accompanying demand hh (in register 8), as well as any subsequent messages, against trigger “x”. M3 is a similar storage command addressed to module “b”, identifying the same trigger “x”.

Messages M4, M5 and M6 are demands to be stored in one or other of the modules. The module to which each is addressed stores the demand against the designated trigger value x. It will be noted that message M4 is identical to message M1 but the module will respond differently than before due to the intervening storage command M2.

Message M7 contains a new storage instruction addressed to module “b”. In this case, the command h′h′ contains a new value, “y” such that the accompanying demand hh and any subsequent demands are stored against trigger “y”. However, in other examples, new demands for register 8 could be stored without changing the trigger data by maintaining the value “x” in the command field h′h′.

Message M8 is a first trigger message, identical to storage commands M2 and M3 except for the address field which is set to “0”. Thus, all modules receive the message. Its designation of register 8 indicates that, once again, the first two hexadecimal digits h′h′ represents a command to the module and, if their value is within the predetermined range (e.g. 1 to 127), this will be recognised as a trigger message. The trigger message is identified by the value of h′h′, which in this case is “x”. Both module “a” and “b” will respond by outputting the demands they have stored which designate trigger “x”. Since both modules receive the trigger M8 at exactly the same time, their responses are synchronised. The remaining hexadecimal digits hh are ignored since no demand is generally transmitted with the trigger command. Conveniently, the digits hh are therefore set to 00. Additional functions could however be added if desired.

A second trigger message M9 may then be issued, having the same format as message M8 but a different value “y” in the command field h′h′. This too is received by both modules and corresponding stored demands are output in response. In this example, only module “b” has received a demand designating trigger “y” (as part of message M7) so there is no response from module “a”.

In alternative embodiments, for instance where a greater number of module addresses is available, the trigger message could be implemented instead by setting the address byte to a “group” address, which a selection of the devices recognise as addressed to them. The addressed modules would then output all of their stored demands.

Once a stored message has been “triggered” and output, it may be deleted from the relevant register, such that if a second matching trigger signal is issued, the same command is not actioned again. However, in some preferred embodiments it is preferred that triggering of a stored message does not lead automatically to deletion, but rather that the stored message remains and will be actioned again upon receipt of another appropriate trigger. This is particularly useful whether certain sequences of actions are to be carried out repeatedly by the network (utilising one or more of the devices). As such, control messages corresponding to the actions to be performed in one cycle, including any necessary scheduling information, can be distributed to the relevant interface modules (connected to the devices to be used) once, and then triggered repeatedly, as many times as required. Thus, cycles of action can be carried out repeatedly with close correspondence of the timing of individual devices in each cycle whilst utilising a very small network bandwidth. Instructions as to whether a control message should be stored beyond triggering may be including in the control message itself (which, for example, could include information as to the number of triggering cycles it should be retained for), or a separate message could be issued by the controlled with instructions to delete all messages stored against a particular trigger. For example, a subset of the available values of the command field h′h′ in the eighth register could be used for this purpose.

A further example is depicted in FIG. 8. This shows four devices 5 a to 5 d and four corresponding interface modules 10 a to 10 d, connected to a controller 2 via a CANbus. The network is shown in a simplified form but it could make use of nodes 4 as described with reference to FIGS. 1, 5 and 6 above.

The contents of each module's memory is shown within each module 10 a-10 d. At the instant depicted, the controller 2 has issued storage commands to all four modules, and 10 demands: A, B, C, D, E, F, G, H, I and J. Each of these has been received by the module 10 a, 10 b, 10 c or 10 d to which it is addressed. As such, module 10 a has received four demands, 10 b has received three, 10 c one and 10 d two. It will be noted that these can be issued by the controller in any desirable order.

The trigger data associated with each demand A-J is indicated in brackets alongside. It will be seen that demand A designates trigger “x”, as does demand B, whereas demand C identifies trigger “z”, and so on. The trigger identification data is set by the storage commands, usually received before a control message is issued (as discussed above, digital output demands may however be issued simultaneously with corresponding trigger identification data, since both make use of the eighth register).

The controller now issues a trigger signal “x” (the labelled being carried in the command field h′h′) which is broadcast to all of the devices 5 a-5 d. In response, interface modules 10 a, 10 b and 10 c will synchronously pass the stored commands identifying trigger “x” to their respective devices (i.e. output the corresponding demands at their signal terminals): device 5 a will perform actions corresponding to commands A and B, device 5 b will perform the action corresponding to command H and device 5 c will perform the action corresponding to command D. Since the actions take place in response to a common trigger signal, received by the three modules at the same time, the actions will be precisely co-ordinated with one another. A further trigger signal could be issued to stop the modules performing the actions. Another trigger signal “y” could be broadcast to action commands E, F, I and G by their respective devices. In preferred embodiments, the trigger signal is broadcast to all of the devices such that all operate exactly synchronously.

Thus, the group of one or more devices to which each trigger message is “addressed” (via the trigger information data) can be changed by the controller 2 dynamically.

This method is preferably implemented using the interface modules described above with reference to FIGS. 1 to 6. However, it could be implemented on an otherwise conventional controller network, provided with interface modules comprising only a processor and a suitable memory, which need not include the conversion unit and configuration unit described above. Nonetheless providing interface modules which perform both of the described functions is much preferred. 

1. A method of controlling a controller network, the controller network comprising a plurality of devices, a controller for outputting control data to the devices, and a plurality of interface modules, each interface module being arranged to connect a respective device to the controller via the network, the method comprising: outputting, from the controller, a control message addressed to a first device, the control message corresponding to an action to be performed by the first device; receiving, at a first interface module connecting the first device to the network, the control message; storing the control message in a memory of the first interface module; broadcasting, from the controller, a trigger message addressed to at least the first device; receiving, at the first interface module, the trigger message; and passing, in response to the trigger message, the control message to the first device such that the action corresponding to the control message is performed.
 2. A method according to claim 1 wherein a plurality of control messages, each corresponding to an action to be performed, are output to, received and stored by the first interface module before the trigger message is broadcast, and in response to the trigger message, at least some of the plurality of control messages are passed to the device in sequence such that the corresponding actions are performed by the device in sequence.
 3. A method according to any of the preceding claims wherein the control messages include scheduling information and the control messages are passed to the device in sequence in accordance with the scheduling information.
 4. A method according to claim 3, wherein the scheduling information defines whether the action corresponding to the control message is to be performed immediately in response to a trigger message or after a delay period, and preferably, the duration of any delay period.
 5. A method according to claim 4, wherein a plurality of control messages are output by the controller, at least some of the control messages including scheduling information defining that the corresponding actions are to be performed after respective delay periods, such that the issue of a corresponding trigger message initiates the corresponding actions in a controlled, timed sequence.
 6. A method according to any of the preceding claims wherein a plurality of control messages are output by the controller addressed to a first plurality of devices, each interface module connecting one of the addressed devices to the network receiving and storing one or more of the control messages, and the trigger message broadcast by the controller is addressed to at least some of the first plurality of devices, each of the interface modules receiving the trigger message passing, in response, its stored control message(s) to the respective device such that the corresponding action(s) is/are performed synchronously by the devices to which the trigger message is addressed.
 7. A method according to any of the preceding claims wherein the trigger message is broadcast to all devices in the controller network.
 8. A method according to any of the preceding claims, wherein the or each trigger message includes an identifier for distinguishing one trigger message from another, and the method further comprises prior to outputting the control message(s), outputting a storage command from the controller addressed to the first device, the storage command including trigger data identifying a trigger message; the interface module corresponding to the first device storing subsequently received control messages and associating the stored control messages with the trigger data; such that when a trigger message is received by the interface module, the control message(s) associated with the identifier of the trigger message are output by the interface module to the device.
 9. A method according to claim 8 wherein the storage command further comprises a control message which is stored upon receipt of the command by the module and associated with the trigger data.
 10. A method according to any of the preceding claims, wherein once the control message has been passed to the device, the control message is deleted from the memory.
 11. A method according to any of claims 1 to 9 wherein after the control message has been passed to the device, the control message is retained in the memory and may be passed to the device again upon receipt of a second trigger message.
 12. A method according to any of the preceding claims wherein the control message includes deletion information defining whether, or after how many trigger messages, the control message is to be deleted from the memory.
 13. A method according to any of the preceding claim further comprising, after the control message(s) have been passed to the device, outputting a deletion command from the controller addressed to the first device, the deletion command including trigger data identifying a trigger message; the interface module corresponding to the first device deleting stored control messages associated with the trigger data upon receipt of the deletion command.
 14. A controller network, comprising one or more devices and a controller for control of the devices, each of the devices being connected to the controller via an interface module, the controller network being adapted to perform the method of any of claims 1 to
 13. 15. A controller network according to claim 14, wherein: the controller is adapted to output a control message addressed to a first one or the devices, the control message corresponding to an action to be performed by the said first device; a first interface module connecting the first device to the network is adapted to store the control message in a memory of the first interface module upon receipt of the control message; the controller is further adapted to broadcast a trigger message addressed to at least the first device; and the first interface module is further adapted to pass, in response to receipt of the trigger message, the control message to the first device such that the action corresponding to the control message is performed by the first device.
 16. A controller network according to claim 14 or claim 15, comprising a CANbus bridge between the interface module(s) and the controller.
 17. A controller network according to any of claims 14 to 16, wherein the controller is adapted to supply and/or receive data in serial format.
 18. A controller network according to any of claims 14 to 17, further comprising at least one power source, power being supplied to the one or more devices from the at least one power source through the network.
 19. A controller network according to claim 18, wherein data communication and power are provided to each device through a common connector.
 20. A controller network according to any of claims 14 to 19 wherein the controller is a programmable logic controller, or a computer, the controller preferably being adapted for synchronous control of the devices.
 21. A controller network according to any of claims 14 to 20 further comprising at least one distribution node, each distribution node being adapted to connect a plurality of interface modules to the control network.
 22. A tool comprising a controller network according to any of claims 14 to
 21. 23. A tool according to claim 22, wherein the tool is a thin film processing tool, preferably a thin film plasma processing tool. 